November 30, 2020

Download Ebook Free Plasma Etching Processes For Interconnect Realization In VLSI

Plasma Etching Processes for Interconnect Realization in VLSI

Plasma Etching Processes for Interconnect Realization in VLSI
Author : Nicolas Posseme
Publisher : Elsevier
Release Date : 2015-04-14
Category : Technology & Engineering
Total pages :128
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This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions. This book focuses on back end of line (BEOL) for high performance device realization and presents an overview of all etch challenges for interconnect realization as well as the current etch solutions proposed in the semiconductor industry. The choice of copper/low-k interconnect architecture is one of the keys for integrated circuit performance, process manufacturability and scalability. Today, implementation of porous low-k material is mandatory in order to minimize signal propagation delay in interconnections. In this context, the traditional plasma process issues (plasma-induced damage, dimension and profile control, selectivity) and new emerging challenges (residue formation, dielectric wiggling) are critical points of research in order to control the reliability and reduce defects in interconnects. These issues and potential solutions are illustrated by the authors through different process architectures available in the semiconductor industry (metallic or organic hard mask strategies). Presents the difficulties encountered for interconnect realization in very large-scale integrated (VLSI) circuits Focused on plasma-dielectric surface interaction Helps you further reduce the dielectric constant for the future technological nodes

Low-Energy Electrons

Low-Energy Electrons
Author : Oddur Ingólfsson
Publisher : CRC Press
Release Date : 2019-04-23
Category : Science
Total pages :418
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Low-energy electrons are ubiquitous in nature and play an important role in natural phenomena as well as many potential and current industrial processes. Authored by 16 active researchers, this book describes the fundamental characteristics of low-energy electron–molecule interactions and their role in different fields of science and technology, including plasma processing, nanotechnology, and health care, as well as astro- and atmospheric physics and chemistry. The book is packed with illustrative examples, from both fundamental and application sides, features about 130 figures, and lists over 800 references. It may serve as an advanced graduate-level study course material where selected chapters can be used either individually or in combination as a basis to highlight and study specific aspects of low-energy electron–molecule interactions. It is also directed at researchers in the fields of plasma physics, nanotechnology, and radiation damage to biologically relevant material (such as in cancer therapy), especially those with an interest in high-energy-radiation-induced processes, from both an experimental and a theoretical point of view.

Atomic-Molecular Ionization by Electron Scattering

Atomic-Molecular Ionization by Electron Scattering
Author : K. N. Joshipura,Nigel Mason
Publisher : Cambridge University Press
Release Date : 2019-01-24
Category : Science
Total pages :278
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Covers quantum scattering theories, experimental and theoretical calculations and applications in a comprehensive manner.

Advances in Atomic, Molecular, and Optical Physics

Advances in Atomic, Molecular, and Optical Physics
Author : Anonim
Publisher : Academic Press
Release Date : 2017-06-07
Category : Science
Total pages :690
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Advances in Atomic, Molecular, and Optical Physics, Volume 66, provides a comprehensive compilation of recent developments in a field that is in a state of rapid growth as new experimental and theoretical techniques are used on many problems, both old and new. Topics covered include related applied areas, such as atmospheric science, astrophysics, surface physics, and laser physics, with timely articles written by distinguished experts that contain relevant review materials and detailed descriptions of important developments in the field. Presents the work of international experts in the field Contains comprehensive articles that compile recent developments in a field that is experiencing rapid growth, with new experimental and theoretical techniques emerging Ideal for users interested in optics, excitons, plasmas, and thermodynamics Topics covered include atmospheric science, astrophysics, surface physics, and laser physics, amongst others

Proceedings .... International IEEE VLSI Multilevel Interconnection Conference

Proceedings .... International IEEE VLSI Multilevel Interconnection Conference
Author : Anonim
Publisher : Unknown
Release Date : 1986
Category : Hybrid integrated circuits
Total pages :129
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1986 Proceedings

1986 Proceedings
Author : Anonim
Publisher : Unknown
Release Date : 1986
Category : Integrated circuits
Total pages :536
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Extended Abstracts

Extended Abstracts
Author : Electrochemical Society
Publisher : Unknown
Release Date : 1987
Category : Electrochemistry
Total pages :129
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Eighth International IEEE VLSI Multilevel Interconnection Conference, 1991

Eighth International IEEE VLSI Multilevel Interconnection Conference, 1991
Author : IEEE Electron Devices Society
Publisher : Institute of Electrical & Electronics Engineers(IEEE)
Release Date : 1991-06
Category : Hybrid integrated circuits
Total pages :456
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1995 Symposium on VLSI Technology

1995 Symposium on VLSI Technology
Author : IEEE Electron Devices Society
Publisher : IEEE
Release Date : 1995
Category : Computers
Total pages :149
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1992 ICO Topical Meeting on Optical Computing

1992 ICO Topical Meeting on Optical Computing
Author : Andreĭ Markovich Goncharenko
Publisher : Society of Photo Optical
Release Date : 1993
Category : Technology & Engineering
Total pages :680
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Technical Proceedings

Technical Proceedings
Author : Anonim
Publisher : Unknown
Release Date : 1985
Category : Integrated circuits
Total pages :129
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Proceedings

Proceedings
Author : Anonim
Publisher : Unknown
Release Date : 1987
Category : Hybrid integrated circuits
Total pages :129
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The Impact of Very High Performance Integrated Circuits on Radar, Guidance and Avionics Systems

The Impact of Very High Performance Integrated Circuits on Radar, Guidance and Avionics Systems
Author : North Atlantic Treaty Organization. Advisory Group for Aerospace Research and Development. Avionics Panel. Symposium
Publisher : Unknown
Release Date : 1985
Category : Avionics
Total pages :129
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NEC Research & Development

NEC Research & Development
Author : Anonim
Publisher : Unknown
Release Date : 1990
Category : Electric apparatus and appliances
Total pages :129
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VLSI Electronics

VLSI Electronics
Author : Norman G. Einspruch
Publisher : Unknown
Release Date : 1981
Category : Integrated circuits
Total pages :129
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